RF classes and process

Plasma, RF Power fundamentals, and RF instrumentation classes summary

The goal of these classes is to bring the audience up to a level where that become fluent and understand at least the basics of the discipline taught, and how to interact with others by way of being able to explain data, or tests they would like to discuss doing.

Plasma Fundamentals

Target audience – Operators, Process managers, engineers and technicians, Equipment managers, engineers and technicians. Class size up to 20.

Prerequisite - none

Class goal – To teach the audience what a plasma is and does, what it is used for, and how the plasma parameters can influence the outcomes of etch, CVD, and PVD processes.

RF Power Fundamentals

Target audience – Process engineers and technicians, Equipment managers, engineers and technicians.  Class size up to 12

Prerequisite – Plasma Fundamentals course, or a good knowledge of plasma

Class goal – To teach the audience what a how RF power is used in the creation of plasma, and how RF power is generated and transmitted through systems components and into the plasma chamber.  Emphasis on how RF parameters can influence the plasma properties which determine process results, on proper grounding and shielding, and on how to troubleshoot common RF problems.

RF Instrumentation - Network analyzer and Z’Scan classes

Target audience –Equipment engineers and technicians.  Small group of maximum four people who will plan to actively use the devices for intensive troubleshooting and repair verification.

Prerequisite – RF Power Fundamentals course

 Class goal – To teach the audience how to actively use these instruments in a fab setting to diagnose, and correct tool problems, and verify that from an RF power standpoint, that the tool is ready for production testing. When finished with the class, these students should be fluent in RF terminology as it relates to RF power delivery to plasmas. They should be able to communicate RF troubleshooting actions and results convincingly using common language to coworkers and managers. The goal is that they learn to present data in a manner that helps to drive actions, such as the garnering of needed resources, or bolstering of procedures and practices required to maintain and run the tools using improved practices and methods. 

RF Diagnostics Kit $19,950.00 This kit contains all that you need for accurate measurement and diagnosis of most RF power delivery problems. The Trewmac RF impedance analyzer can be used to measure anything from cable length to intrinsic chamber impedance. The Advanced Energy Z'Scan RF sensor allows the user to measure power and impedance of the system under load to enable expert system baselining and troubleshooting. Also included in the kit is Z’Analyze software, and an assortment of coaxial connectors that can be tailored to your application. It all comes in a rugged, airline-checkable carry case, making it the perfect 'Go Bag' for RF system work.